JPH0125477Y2 - - Google Patents

Info

Publication number
JPH0125477Y2
JPH0125477Y2 JP1983095963U JP9596383U JPH0125477Y2 JP H0125477 Y2 JPH0125477 Y2 JP H0125477Y2 JP 1983095963 U JP1983095963 U JP 1983095963U JP 9596383 U JP9596383 U JP 9596383U JP H0125477 Y2 JPH0125477 Y2 JP H0125477Y2
Authority
JP
Japan
Prior art keywords
heater
trap
furnace body
hole
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983095963U
Other languages
English (en)
Japanese (ja)
Other versions
JPS603643U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9596383U priority Critical patent/JPS603643U/ja
Publication of JPS603643U publication Critical patent/JPS603643U/ja
Application granted granted Critical
Publication of JPH0125477Y2 publication Critical patent/JPH0125477Y2/ja
Granted legal-status Critical Current

Links

JP9596383U 1983-06-22 1983-06-22 電子顕微鏡等の汚染防止装置 Granted JPS603643U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9596383U JPS603643U (ja) 1983-06-22 1983-06-22 電子顕微鏡等の汚染防止装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9596383U JPS603643U (ja) 1983-06-22 1983-06-22 電子顕微鏡等の汚染防止装置

Publications (2)

Publication Number Publication Date
JPS603643U JPS603643U (ja) 1985-01-11
JPH0125477Y2 true JPH0125477Y2 (en]) 1989-07-31

Family

ID=30228918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9596383U Granted JPS603643U (ja) 1983-06-22 1983-06-22 電子顕微鏡等の汚染防止装置

Country Status (1)

Country Link
JP (1) JPS603643U (en])

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS504656U (en]) * 1973-05-16 1975-01-18
JPS5132351U (en]) * 1974-08-30 1976-03-09
JPS5518745Y2 (en]) * 1975-07-24 1980-05-01

Also Published As

Publication number Publication date
JPS603643U (ja) 1985-01-11

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